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FIB processes for TEM sample prep from microsample extraction out of bulk sample to lamella thinning and eventually Ar ion beam finishing were automated using a FIB-SEM-Ar Triple Beam system. After Auto-Microsampling (in-situ lift out) and auto-thinning processes, Ar ion beam was automatically irradiated to reduce FIB-induced damage to realize unattended TEM lamella preparation. #Cu #CrystalOrientation #EBSD #GrainBoundary #FIB #SEM #FIBSEM #electronmicroscopy #ElectronMicroscope Available instr
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Real-time STEM on orthogonally-arranged (L-shape) FIB-SEM enabled highly accurate site-specific TEM lamella preparation from 14 nm FinFET. Targeting the gate metal, metal layers (M1) on both sides were completely removed by FIB and low energy Ar ion milling utilizing STEM observation as well as SEM. Available instruments for this measurement are : L-shape FIB-SEM https://www.hitachi-hightech.com/global/science/products/microscopes/focused-ion-beam-systems/nx9000.html Aberration Corrected STEM ht
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TEM sample prep of 1y nm DRAM #TEM #Lamella #1ynm #DRAM #FIB #electronmicroscopy #ElectronMicroscope For details, please see the description at https://www.youtube.com/watch?v=11NsjuZ416M&list=PL26wsKAGp_QZwiY8L-FToKM2HTPq4AG23&index=78 | Hitachi Electron Microscope
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